CH EN 5655 - Silicon-Chip Processing

Meets with CH EN 6655. This course introduces chemical engineers to (1) semiconductor materials and their properties, (2) device physics, structure and electrical properties, (3) the vocabulary of the industry, and (4) applications of the fundamentals of chemical engineering (mass transfer, heat transfer, and reaction kinetics) to problems in semiconductor processing. The silicon-chip processing steps to be emphasized include crystal growth, diffusion, implantation, photolithography (with emphasis on light induced reactions in photo-resists), deposition methodologies (with emphasis on chemical vapor deposition of various materials) and polishing. In addition to teaching quantitative ways of analyzing these processes, this course will focus on how to minimize defects.