ECE 5221 - Fundamentals of Micromachining Processes

Meets with ME EN 6050, ECE 6221, BIOEN 6421, MSE 6421. Introduction to the principles of micromachining technologies. Topics include photolithography, silicon etching, thin film deposition and etching, electroplating, polymer micromachining, and bonding techniques. A weekly lab and a review of micromachining applications is included. Undergraduate students only.