ECE 7231 - Microsensors and Actuators

The course builds on ECE 5221/6221, Fundamentals of Micromachining. Topics include definitions, categorization and application fields of microsensors and actuators, an introduction to solid state physics, piezoresistive sensors, semiconductor-based temperature sensors, magnetoresistive sensors, thermoelectric sensors, photoelectric sensors, micro gas and fluid concentration sensors, molecular diagnostics arrays, and various actuators (relays, micromotors, inkjet printheads, micropumps), sensor packaging and assembly. Registration for a weekly lab (1) is required. Extra work required of graduate students.