Course Detail
Units:
3.0
Course Components:
Lecture
Enrollment Information
Enrollment Requirement:
Prerequisite: EL EN 6261 or both 5201 and 5202.
Description
Current topics in silicon device physics. Review of MOS device theory, rules for scaling devices to submission dimensions, theoretical limits to scaling. Short channel, device models including two-dimensional numerical models. Hot carrier effects and other reliability issues. Yield statistics, lifetime prediction.