Course Detail
Units:
4.0
Course Components:
Laboratory
Lecture
Enrollment Information
Enrollment Requirement:
Prerequisites: 'C-' or better in (ECE 5221 OR ECE 6221 OR ME EN 5050 OR ME EN 6050 OR MSE 6421 OR BME 6421) AND NOT on ECE Monitoring Group
Description
This course builds on ECE 5221/6221, Fundamentals of Micromachining. Topics include definitions, categorization, comparison and application fields of microsensors. The course discusses related solid state physics, piezoresistive sensors, semiconductor-based temperature sensors, magnetoresistive sensors, thermoelectric sensors, photoelectric sensors, micro gas and fluid concentration sensors, molecular diagnostics arrays and other sensors. registration for a weekly lab (1) is required. extra work required of graduate students.