Course Detail
Units:
3.0
Course Components:
Laboratory
Lecture
Enrollment Information
Enrollment Requirement:
Prerequisites: Graduate status OR Instructor Consent.
Description
Introduction to the principles of micromachining technologies. Topics include photolithography, silicon etching, thin film deposition and etching, electroplating, polymer micromachining, and bonding techniques. A weekly lab and a review of micromachining applications is included. Graduate students only. Extra work required.