Course Detail
Units:
--
Course Components:
Laboratory
Lecture
Enrollment Information
Enrollment Requirement:
Prerequisites: Full Major status in (Electrical Engineering OR Computer Engineering) AND Instructor Consent.
Description
Introduction to the principles of micromachining technologies. Topics include photolithography, silicon etching, thin film deposition and etching, electroplating, polymer micromachining, and bonding techniques. A weekly lab and a review of micromachining applications is included. Undergraduate students only.