ECE 6226 - Electrical Interface for MEMS

Micro-Electro-Mechanical Systems (MEMS) technology enables the realization of complex mechanical structures on a micron scale using batch fabrication process similar to that used by integrated circuit manufacturers. These microstructures serve as key components to implement various precision sensors for navigation, industrial sensing, biomedical monitoring, consumer electronics, as well as high-performance building blocks used for wireless communication. This course will cover operating principles of MEMS resonators and inertial sensors including accelerometers and gyroscopes. Critical electronic interface design considerations in terms of interface topology, sensing resolution, dynamic range, and power dissipation will be discussed. MEMS applications in wireless communication will also be covered. Wireless transceiver key components such as MEMS-based high-frequency low phase noise voltage-controlled oscillators, filters, switches, etc. will be discussed and analyzed. The students after taking this course will be able to design and implement electronic interface circuits and systems for various MEMS sensors and resonators with a good understanding of fundamental design trade-off and performance limitation.