Course Detail
Units:
3.0
Course Components:
Laboratory
Lecture
Enrollment Information
Enrollment Requirement:
Prerequisites: Instructor Consent.
Description
Meets with ECE 5221 and ME EN 5050. Introduction to the principles of micromachining technologies. Topics include photolithography, silicon etching, thin film deposition and etching, electroplating, polymer micromachining, and bonding techniques. A weekly lab and a review of micromachining applications is included. Graduate students only. Extra work required.