ECE 6235 - Nano-Electro Mechanical System

Applications of Nano and Micro Electro Mechanical Systems (NEMS and MEMS) will be discussed in information, defense, health and energy conversion technologies. NEMS and MEMS offer many unique solutions to sensing (physical, chemical and biological), communications (oscillators, filters/resonators, switches, etc.), microfluidics (for chemical synthesis, analysis, lab-on-a-chip, etc.) and actuators. We will start with simple MEMS structures and will develop a framework for design and realization of superior devices for these and related applications. Working knowledge of elementary E&M and Circuits is desired for this course.