PHYS 5739 - Scanning Electron Microscopy

The SEM: capabilities, advantages and limitations. Electron sources, electron optics and detectors. Components of the electron microscope, their principles of operation and failure modes. Image quality, optimization and interpretation. Decision tree and analytical strategies for microscopy. Review of atomic physics and characteristic x-ray emission. Principles and operation of instrumentation for elemental analysis by Energy Dispersive Spectroscopy, discussion of pitfalls and strategies. Low vacuum, ESEM and Focused Ion Beam. Lectures are based on lab exercises.