ME EN 6620 - Fundamentals of Microscale Engineering

Introduction to microscale and nanoscale engineering. Topics include scaling laws, metrology methods, and mircofabrication technologies such as photolithography, sputtering, ion-beam etching, chemical vapor deposition, bulk micromachining, surface micromachining, LIGA, laser ablation, and micromilling. Microscale thermal fluid phenomena, such as slip flow, temperature jump, viscosity variation, surface tension effects and conduction in thin films, are introduced. MEMS and microfluidic applications, such as sensors, actuators, micrototal analysis systems, electronic cooling are presented. Meets with ME EN 5620.