Course Detail
Units:
1.0
Course Components:
Laboratory
Enrollment Information
Enrollment Requirement:
Prerequisites: "C-" pr better in (ECE 5221 OR ECE 6221) AND Full Major status in (Electrical Engineering OR Computer Engineering).
Corequisites: "C-" or better in ECE 5231.
Description
The lab is a compulsory section to the lecture Microsensors (ECE 5231/6231) and builds on ECE 5221/6221, Fundamentals of Micromachining. The lab will include the following topics: design and simulation of microsensors, process design, packaging and assemble, characterization and testing of microsensors. The first part of the lab will focus on the acquirement of additional technological skills and understanding of sensor characteristics. The second part of the lab will lead to the fabrication, characterization and presentation of a variety of fully functional microsensors. Examples of these are pressure, force, acceleration, and gas sensors.