ECE 6232 - Microsensors and Actuators Lab

The lab is a compulsory section to the lecture Microsensors and Actuators (ECE 5231/6231) and builds on ECE 5221/6221, Fundamentals of Micromachining. The lab will include the following topics: design and simulation of microsensors, process design, packaging and assembly, characterization and testing of microsensors. The first part of the lab will focus on the acquirement of additional technological skills and understanding of sensor characteristics. The second part of the lab will lead to the fabrication, characterization and presentation of a variety of fully functional microsensors. Examples of these are pressure, force, acceleration, and gas sensors.