ECE 5202 - Integrated Circuit Microfabrication

Fundamentals of integrated circuit fabrication, basic understanding of IC processes and the effect of processing choices on device performance. Students learn to use process simulation tools and also fabricate and characterize devices in the laboratory. Processing techniques and design methodologies of microfabrication will be covered. Process modules will be discussed: lithography, thermal oxidation, diffusion, ion implantation, etching, thin-film deposition, epitaxy, and metalization. Process simulation and layout design rules aimed toward the fabrication of Metaloxide-Semiconductor MOS devices and process integration will also be covered. The laboratory part of the course will provide hands-on experience to fabricate and characterize a CMOS chip.