Course Detail
Units:
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Course Components:
Laboratory
Lecture
Enrollment Information
Enrollment Requirement:
Prerequisites: (MSE 2010 OR MSE 2160) AND (PHYS 2220 OR PHYS 3220) AND Major status in the College of Engineering AND NOT on ECE Monitoring Group
Description
Introduction to the principles of micromachining technologies. Topics include photolithography, silicon etching, thin film deposition and etching, electroplating, polymer micromachining, and bonding techniques. A weekly lab and a review of micromachining applications is included. Undergraduate students only.